Jetalon

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CR-288® to be Featured in White Paper Presented to 2007 ISMI Conference

The CR-288® monitor and control system has been featured in a white paper presented to the 2007 ISMI conference, held in Milan, Italy. The paper was co-authored and presented by Chartered Semiconductor Manufacturing’s Carlo Dominic Aparese, Kinetics Process Systems’ Srinath Rajan and Jetalon Solutions’ Christopher Wacinski.

The paper, entitled “CMP Slurry Blending Process Optimization and Cost Improvements using Real-time Concentration Monitoring” presented data collected during the course of a study undertaken at Chartered Semiconductor Manufacturing’s Singapore manufacturing facility. For purposes of collecting data, the engineers installed a real-time concentration monitoring system in a slurry blending system used in the chemical-mechanical planarization (CMP) manufacturing process. The principle reason for doing so was to determine the feasibility of replacing a complex auto-titration system with a compact, in-situ concentration monitoring system. This replacement would provide cost reduction as well as process optimization capabilities for manufacturers to further improve and streamline the CMP slurry blending process. During the course of the study, a CR-288® Concentration Sensor was installed in a Kinetics Slurry Blending System to monitor in real-time the peroxide concentration of the slurry batch from the initial stage of slurry mixing to the final step of supplying the qualified slurry to the CMP polishers.

It was determined by the authors in their paper and presentation that the integration of the CR-288® real-time concentration sensor in the slurry blending system contributed to a 60% cost reduction in the equipment cost of ownership (COO) as well as the optimization of the blending process parameters.

About Jetalon Solutions, Inc.
Founded in 2002, Jetalon produces unparalleled fluid metrology analysis systems for the most demanding manufacturing applications. Based on breakthrough technology, our miniaturized sensors offer extremely high resolution, complete process transparency and measurements in fractions of a second. Constructed of ultra-high purity materials with no moving parts, Jetalon’s sensors can be used with virtually any combination of chemicals and are easy to implement in manufacturing processes.

Jetalon Solutions, Inc. is headquartered in Los Gatos, CA. For more information, please visit www.jetalon.com or call Duncan McPhee at 408-866-6318.

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